Vacuum-compatible submicron feedback stage with 100mm operation
Usable in a vacuum! Positioning stage with built-in linear encoder and sub-micron resolution.
The stage position is detected using a built-in optical linear encoder, enabling full closed-loop control, which results in high resolution and excellent position reproducibility. It has been treated for outgassing and can be used in a vacuum. It can operate within a range of 100mm, with a resolution of "50nm" or "100nm" depending on the controller.
- Company：シグマ光機
- Price：Other
